Electrical x-talk shield for MEMS micromirrors

ABSTRACT

A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present invention is a continuation-in-part of U.S. patentapplication Ser. No. 10/445,360, which claims priority from U.S. PatentApplication No. 60/383,106 filed May 28, 2002, which are bothincorporated herein by reference. The present invention also claimspriority from U.S. Patent Applications Nos. 60/479,222 filed Jun. 18,2003 and 60/504,210 filed Sep. 22, 2003, which are incorporated hereinby reference.

TECHNICAL FIELD

The present invention relates to a micro-electro-mechanical (MEMs)device including an array of tilting platforms actuated by electrodes,and in particular to a MEMs mirror array with shielding to preventelectrical cross-talk between mirrors.

BACKGROUND OF THE INVENTION

Conventional MEMs mirrors for use in optical switches, such as the onedisclosed in U.S. Pat. No. 6,535,319 issued Mar. 18, 2003 to Buzzetta etal, redirect beams of light to one of a plurality of output ports, andinclude an electro-statically controlled mirror pivotable about a singleaxis. Tilting MEMs mirrors, such as the ones disclosed in U.S. Pat. No.6,491,404 issued Dec. 10, 2002 in the name of Edward Hill, and UnitedStates Patent Publication No. 2003/0052569, published Mar. 20, 2003 inthe name of Dhuler et al, which are incorporated herein by reference,comprise a mirror pivotable about a central longitudinal axis. The MEMsmirror device 1, disclosed in the aforementioned Hill patent, isillustrated in FIG. 1, and includes a rectangular planar surface 2pivotally mounted by torsional hinges 4 and 5 to anchor posts 7 and 8,respectively, above a substrate 9. The torsional hinges may take theform of serpentine hinges, which are disclosed in U.S. Pat. No 6,327,855issued Dec. 11, 2001 in the name of Hill et al, and in United StatesPatent Publication No. 2002/0126455 published Sep. 12, 2002 in the nameof Robert Wood, which are incorporated herein by reference. In order toposition conventional MEMs mirror devices in close proximity, i.e. witha high fill factor (fill factor=width/pitch), they must be positionedwith their axes of rotation parallel to each other. Unfortunately, thismirror construction restraint greatly restricts other design choicesthat have to be made in building the overall switch.

When using a conventional MEMs arrangement, the mirror 1 positioned onthe planar surface 2 can be rotated through positive and negativeangles, e.g. ±2°, by attracting one side 10 a or the other side 10 b ofthe planar surface 2 towards the substrate 6. Unfortunately, when thedevice is switched between ports at the extremes of the devicesrotational path, the intermediate ports receive light for fractions of amillisecond as the mirror 1 sweeps the optical beam past these ports,thereby causing undesirable optical transient or dynamic cross-talk.

One solution to the problem of dynamic cross-talk is to initially orsimultaneously rotate the mirror about a second axis, thereby avoidingthe intermediate ports. An example of a MEMs mirror device pivotableabout two axes is illustrated in FIG. 2, and includes a mirror platform11 pivotally mounted by a first pair of torsion springs 12 and 13 to anexternal gimbal ring 14, which is in turn pivotally mounted to asubstrate 16 by a second pair of torsion springs 17 and 18. Examples ofexternal gimbal devices are disclosed in U.S. Pat. No. 6,529,652 issuedMar. 4, 2003 to Brenner, and U.S. Pat. No. 6,454,421 issued Sep. 24,2002 to Yu et al. Unfortunately, an external gimbal ring greatly limitsthe number of mirrors that can be arranged in a given area and therelative proximity thereof, i.e. the fill factor. Moreover, the externalgimbal ring may cause unwanted reflections from light reflecting off thesupport frame 13, 14.

Another proposed solution to the problem uses high fill factor mirrors,such as the ones disclosed in U.S. Pat. No. 6,533,947 issued Mar. 18,2003 to Nasiri et al, which include hinges hidden beneath the mirrorplatform. Unfortunately, these types of mirror devices require costlymulti-step fabrication processes, which increase costs and result in lowyields.

The solution to overcome the shortcomings of the prior art proposed bythe inventors of the parent application listed above is to provide ahigh fill factor MEMs mirror device that can pivot about the same axisas an adjacent mirror. In a preferred embodiment the MEMs mirror deviceis relatively easy to fabricate, with an internal gimbal ring andapplicable in high fill factor applications.

Typically MEMs devices are independently actuated by an electrodemounted on the substrate below the tilting platform for inducing avoltage-controlled rotation via an electrostatic torque. An unfortunateconsequence of closely packed tilting platforms is that the actuation ofa single platform by a primary electrode results in electric fringingfields, which will cause a torque and a resultant angular rotation onadjacent platforms.

An object of the present invention is to overcome the shortcomings ofthe prior art by providing a MEMs device, which is actuated by a primaryelectrode, with electrical cross-talk shielding to prevent the unwantedactuation of adjacent devices by electric fringing fields from theprimary electrode.

SUMMARY OF THE INVENTION

Accordingly, the present invention relates to A micro-electro-mechanicaldevice mounted on a substrate comprising:

a first pivoting member pivotally mounted above the substrate;

a second pivoting member pivotally mounted above the substrate adjacentthe first pivoting member;

a first electrode for actuating the first pivoting member;

a second electrode positioned proximate the first electrode foractuating the second pivoting member; and

a first shield positioned between the first and second electrodes forshielding the first pivoting member from fringing electric fields fromthe second electrode.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described in greater detail with reference to theaccompanying drawings which represent preferred embodiments thereof,wherein:

FIG. 1 is an isometric view of a conventional tilting MEMs mirrordevice;

FIG. 2 is a plan view of a pair of conventional external gimbal ringMEMs mirror devices;

FIG. 3 is an isometric view of a plurality of Piano-MEMs mirror devicesaccording to the present invention;

FIG. 4 is an isometric view of a hinge structure of the mirror devicesof FIG. 3;

FIG. 5 is an isometric view of a plurality of Piano-MEMs mirror deviceswithout shielding;

FIG. 6 is an end view of the mirror devices of FIG. 5;

FIG. 7 is an isometric view of a plurality of Piano-MEMs mirror deviceswith electrodes according to the present invention with substrateshielding;

FIG. 8 is an end view of the mirror devices of FIG. 7;

FIG. 9 is an isometric view of an alternative electrode structure of themirror devices of FIGS. 3 and 4;

FIG. 10 is an isometric view of a plurality of Piano-MEMs mirror deviceswith electrodes according to the present invention with substrate andplatform shielding;

FIG. 11 is an end view of the mirror devices of FIG. 10;

FIG. 12 is an end view of an alternative embodiment of the mirrordevices of FIG. 10;

FIG. 13 is an isometric view of an internal gimbal ring MEMs mirrordevice according to the present invention;

FIG. 14 is an isometric view of a hinge structure of the mirror devicesof FIG. 13;

FIG. 15 is an isometric view of an electrode structure of the mirrordevices of FIGS. 13 and 14;

FIG. 16 is an end view of the internal gimbal ring MEMs mirror device ofFIGS. 13 and 14;

FIG. 17 is a graph of Voltage vs Time provided by the electrodestructure of FIG. 15 and 16;

FIG. 18 is a schematic diagram of a wavelength switch utilizing themirror devices of the present invention;

FIG. 19 is a schematic diagram of the input/output assembly for thewavelength switch of FIG. 18; and

FIG. 20 is a schematic diagram of an alternative embodiment of an inputassembly for the wavelength switch of FIG. 18.

DETAILED DESCRIPTION

In accordance with the present invention an array of “Piano” MEMs mirrordevices 21, 22 and 23, which pivot about a single axis of rotation θ_(y)above a substrate 25, is illustrated in FIGS. 3 and 4. Each mirrordevice 21, 22 and 23 includes a pivoting platform 26 defined by firstand second substantially-rectangular planar supporting regions 27 and 28joined by a relatively-thin substantially-rectangular brace 29 extendingtherebetween. Typically, each planar surface is coated with a reflectivecoating, e.g. gold, for simultaneously reflecting a pair of sub-beams oflight traveling along parallel paths, as will be hereinafter discussed.Each brace 29 acts like a lever and is pivotally mounted on C orI-shaped anchor posts 30 and 31 via first and second torsional hinges 32and 33, respectively. The anchor posts 30 and 31 extend upwardly fromthe substrate 25. The ends of the first torsional hinge 32 are connectedto the anchor post 30 and the brace 29 along the axis θ_(y). Similarly,the ends of the second torsional hinge 33 are connected to the anchorpost 31 and the brace 29 along the axis θ_(y). Preferably, each of thefirst and second torsional hinges 32 and 33 comprises a s erpentinehinge, w hich are c onsiderably more robust than conventional torsionalbeam hinges. The serpentine hinge is effectively longer than a normaltorsional hinge, which spans the same distance, thereby providinggreater deflection and strength, without requiring the space that wouldbe needed to extend a normal full-length torsional hinge.

With particular reference to FIGS. 5 and 6, each platform 26 is rotatedby the selective activation of a first electrode 36, whichelectro-statically attracts the first planar section 27 thereto or bythe selective activation of a second electrode 37 (see FIG. 9), whichelectro-statically attracts the second planar section 28 thereto. A gap38, illustrated in FIG. 9, is provided between the first and secondelectrodes 36 and 37 for receiving the anchor posts 31, which extendfrom the substrate 25 to adjacent the platforms 26.

A consequence of closely packed micro-mirrors is that the actuation of asingle mirror will impart a torque, i.e. an angular rotation, ontoadjacent mirrors as a result of fringing electric fields 35. In aneffort to minimize this electrical cross-talk, electrode groundingshields 41, see FIGS. 7, 8 and 9, are positioned on the substrate 25 oneither side of the first and second electrodes 36 and 37 formingelectrode cavities, which are electrically isolated from each other. Theelectrode grounding shields 41 extend the length of the first and secondelectrodes 36 and 37, perpendicular to the axis of rotation θ_(y) of theplatforms 26, defined by the gap 38. The walls of the electrodegrounding shields 41 extend upwardly above the upper plane of the firstand second electrodes 36 and 37. The grounding shields 41 are kept atground potential, i.e. the same as the mirrored platforms 26, while oneof the first and second electrodes is held at an activation voltage,e.g. 100 Volts.

In the disclosed open loop configuration, the angular position of theplatforms 26 depend non-linearly on the voltage applied by theelectrodes 36 (or 37), i.e. as the applied voltage is increasedlinearly, the incremental change in angular platform position is greateras the voltage increases. Accordingly, there is a maximum voltage, i.e.an angular platform position, at which the platform angular positionbecomes unstable and will uncontrollably tilt until hitting part of thelower structure, e.g. the electrode 36. This maximum voltage sets therange of angular motion that the platform 26 can travel. The instabilityin the platform's angular position is a result of the distance betweenthe platform 26 and the electrode 36 (the hot electrode) decreasing morerapidly at the outer free ends of the platform 26 than at the innersections, nearer the pivot axis θ_(y) As a result, the force per unitlength along the platform 26 increases more rapidly at the outer freeends of the platform 26 than the inner sections. To increase theplatform's range of angular motion, the field strength, i.e. the forceper unit area, that is sensed at the outer free ends of the platform 26must be reduced. With reference to FIGS. 5 to 9, this is accomplished byproviding the electrodes 36 and 37 with a two step configuration. Uppersteps 36 a and 37 a are positioned proximate the inner end of theplatform 26, while lower steps 36 b and 37 b are positioned under theouter free ends of the platform 26, thereby making the gap between theplatforms 26 and the electrodes 36 and 37 greater at the outer free endthan the inner end. The area of the lower steps 36 b and 37 b can alsobe made smaller, thereby reducing the force per unit area sensed by theouter free end of the platform 26.

FIG. 9 illustrates C-shaped grounding shields 140, which include lateralportions 140 a for partially surrounding the electrode 36.

To further eliminate cross-talk between adjacent electrodes 36,additional platform shields 42 (FIGS. 10, 11 and 12) can be added to theunderside of the planar sections 27 and 28, outside or inside of theelectrode shields 41. Typically, in the rest position, the two differentsets of shields 41 and 42 are offset from each other and do not overlap;however, as the platform 26 tilts the platform shields 42 begin tooverlap the grounding shielding 41. The added protection provided byoverlapping shielding is particularly a dvantageous, when the tilt angleof the platform 26 is proportional to the voltage applied to theelectrode 36 (or 37), such as in open loop configurations. Accordingly,the greater the tilt angle, the greater the required voltage, and thegreater the amount of potential cross-talk, but consequently the greaterthe amount of shielding provided by the overlapping ground and platformshields 41 and 42, respectively.

Since the MEMs mirror devices 21, 22 and 23 are for use in opticaldevices, i.e. wavelength blockers and multiple wavelength switches (seeFIG. 18), which include a grating for dispersing the light into spectralwavelength component channels, it is an important performancerequirement that the spectral response has a high rejection of lightbetween the selected wavelength channels. Unfortunately, in conventionalMEMs devices, light passes between the mirrors and is reflected off thesubstrate back into the optical device, thereby leading to adeterioration in the isolation between the wavelength channels.Accordingly, the present invention provides back reflection cusps 50,defined by angled, curved or concave reflecting surfaces intersectingalong a ridge, extending longitudinally below the gap between theplatforms 26, for scattering any light passing between the mirroredplatforms 26 in a direction substantially parallel to the surface of theplatforms 26.

FIG. 12 illustrates a preferred embodiment in which the platform shields42 are etched on the underside of the platforms 26, and the groundshields 41 are etched on the upper surface of the substrate 25. Trenches45 are also etched from the upper surface of the substrate 25 forreceiving the electrodes 36 and 37, while trenches 46 are etched fromthe upper surface of the substrate 25 to ensure the platform shields 42have a free range of motion. Back reflection cusps 50 are provided on anadditional ground shield 141 disposed between the platform shields 42 ofadjacent platforms 26. When the additional ground shield 141 isprovided, the original ground shields 41 can be eliminated.

FIGS. 13 and 14 illustrate an array of internal gimbal ring MEMs mirrordevices 201 utilizing a first pair of serpentine torsional hinges 202 aand 202 b for pivoting a rectangular platform 203 about a first axis ofrotation θ_(x), and a second pair of serpentine torsional hinges 204 aand 204 b for rotating the platform 203 about a second axis of rotationθ_(y) above a base substrate 205. The first pair of serpentine torsionalhinges 202 a and 202 b extend from a single anchor post 206, whichextends upwardly from the base substrate 205 through the center of theplatform 203, i.e. at the intersection of the minor and major axesthereof. Outer ends of the first pair of torsional serpentine torsionalhinges 202 a and 202 b are connected to a rectangular gimbal ring 208,which surrounds the first pair of serpentine hinges 202 and 202 b, atpoints along the minor axes (θ_(y)) of the platform 203. The second pairof serpentine torsional hinges 204 a and 204 b extend from oppositesides of the gimbal ring 208 into contact with the platform 203, atpoints along the major axis (θ_(x)) of the platform 203.

To provide a full range of motion for the platform 203, a set of fourelectrodes 211, 212, 213 and 214 are provided (See FIG. 15); however,for the present invention only the first, second and third electrodes211, 212 and 213 are required to roll the mirrors out of alignment withany intermediate output ports and then back into alignment with adesignated output port. Accordingly, first, second and third voltagescan be established between the platform 203 and the first electrode 211,the second electrode 212 and the third electrode 213, respectively.Initially, the first and second electrodes 211 and 212 are activated torotate the platform 203 about θ_(x). Subsequently, the first voltage isgradually lowered to zero, while the third voltage is graduallyincreased until it is equivalent to the second voltage (See FIG. 17). Tominimize unwanted effected caused by ringing, i.e. vibration of themirrors caused by an abrupt start or stop, the first, second and thirdvoltages are increased gradually, as evidenced in FIG. 17, whichillustrates the voltages curves for the various electrodes (first,second and third) over the actuation time of the mirror device. Variousmirror tilting patterns can be designed based on the desiredcharacteristics, e.g. attenuation, of the light.

FIG. 16 illustrates grounding shields 241 and platform shields 242,which minimize electrical cross-talk between the electrodes 211 to 214of the internal gimbal ring MEMs mirror devices 201. Since the platforms203 rotate about two axes, it is important to provide enough clearancebetween the grounding shields 241 and the platform shields 242 toprevent any contact therebetween during the full range of motion of theplatform 203. A separate light reflecting cusp 251 is provided toreflect any light passing between the platforms 203 substantiallyparallel thereto, thereby preventing light from reflecting back betweenthe mirrors and into the optics of the switch. Alternatively, theplatform shields 242 could be omitted, whereby the cusp 251 would act asboth shield and light reflector.

The “piano” MEMs mirror devices according to the present invention areparticularly useful in a wavelength switch 301 illustrated in FIGS. 18,19 and 20. In operation, a beam of light with a plurality of differentwavelength channels is launched via an input/output assembly 302, whichcomprises a plurality of input/output ports, e.g. first, second, thirdand fourth input/output ports 303, 304, 305 and 306, respectively. Thebeam is directed to an element having optical power, such as concavemirror 309, which redirects the beam to a dispersive element 311, e.g. aBragg grating. The dispersive element separates the beam into thedistinct wavelength channels (λ₁, λ₂, λ₃), which are again directed toan element having optical power, e.g. the concave mirror 309. Theconcave mirror 309 redirects the various wavelength channels to an arrayof “piano” MEMs mirror devices 312 according to the present invention,which are independently controlled to direct the various wavelengthchannels back to whichever input/output port is desired. Wavelengthchannels designated for the same port are reflected back off the concavemirror 309 to the dispersive element 311 for recombination andredirection off the concave mirror 309 to the desired input/output port.The concave mirror 309 can be replaced by a single lens with otherelements of the switch on either side thereof or by a pair of lenseswith the dispersive element 311 therebetween.

With particular reference to FIG. 19, the input/output assembly 302includes a plurality of input/output fibers 313 a to 313 d with acorresponding collimating lens 314 a to 314 d. A single lens 316 is usedto convert a spatial offset between the input/output ports into anangular offset. FIG. 20 illustrates a preferred embodiment of theinput/output assembly, in which the unwanted effects of polarizationdiversity are eliminated by the use of a birefringent crystal 317 and awaveplate 318. For incoming beams, the lens 316 directs each beamthrough the birefringent crystal 317, which separates the beam into twoorthogonally polarized sub-beams (o and e). The half waveplate 318 ispositioned in the path of one of the sub-beams for rotating thepolarization thereof by 90°, so that both of the sub-beams have the samepolarization for transmission into the remainder of the switch.Alternatively, the waveplate 318 is a quarter waveplate and rotates oneof the sub-beams by 45° in one direction, while another quarterwaveplate 319 rotates the other sub-beam by 45° in the oppositedirection, whereby both sub-beams have the same polarization. Foroutgoing light, the polarization of one (or both) of the similarlypolarized sub-beams are rotated by the waveplate(s) 318 (and 319), sothat the sub-beams become orthogonally polarized. The orthogonallypolarized sub-beams are then recombined by the birefringent crystal 317and output the appropriate input/output port. Themicro-electro-mechanical devices according to the present invention areparticularly well suited for use in switching devices with polarizationdiversity front ends, since they provide a pair of reflecting surfaces,i.e. one for each sub-beam.

1. A micro-electro-mechanical device mounted on a substrate comprising:a first pivoting member pivotally mounted above the substrate; a secondpivoting member pivotally mounted above the substrate adjacent the firstpivoting member; a first electrode for actuating the first pivotingmember; a second electrode positioned proximate the first electrode foractuating the second pivoting member; a first shield positioned betweenthe first and second electrodes extending upwardly above an uppersurface of the first electrode for shielding the first pivoting memberfrom fringing electric fields from the second electrode.
 2. The deviceaccording to claim 1, wherein the first shield extends downwardly fromthe first or second pivoting member.
 3. The device according to claim 1,wherein the first shield extends upwardly from the substrate between thefirst and second electrodes.
 4. The device according to claim 3, whereinthe first shield includes an angled, curved or concave upper surface forredirecting light passing between the first and second pivoting members.5. The device according to claim 3, wherein the first shield extends thefull length of the first electrode.
 6. The device according to claim 3,further comprising a second shield extending downwardly from the firstor second pivoting member, laterally offset from the first shield,whereby during movement of the first or second pivoting member the firstand second shields overlap.
 7. The device according to claim 6, whereinsaid first shield includes shielding positioned on opposite sides of thefirst and second electrodes; and wherein said second shield includesshielding extending from underneath of the first and second pivotingmembers on opposite sides of the first and second electrodes,respectively.
 8. The device according to claim 3, wherein each of thefirst and second pivoting members includes first and second supportingregions on opposite sides of a first pivot axis; wherein the firstelectrode is positioned below the first supporting region of the firstpivoting member, and the second electrode is positioned below the firstsupporting region of the second pivoting member; wherein the devicefurther comprises: a third electrode positioned below the secondsupporting region of the first pivoting member; a fourth electrodepositioned below the second supporting region of the second pivotingmember; and a third shield extending upwardly from the substrateincluding shielding on opposite sides of the third and fourth electrode.9. The device according to claim 8, wherein each of the first and secondpivoting members includes: a brace means extending between the first andsecond supporting regions; a first torsional hinge rotatable about thefirst pivot axis extending between the brace means and an anchor postextending from the substrate; whereby the first and second pivotingmember are pivotable about the first pivot axis and are positionable inclose proximity with only an air gap between adjacent first supportingregions and between adjacent second supporting regions.
 10. The deviceaccording to claim 7, wherein each of the first and second pivotingmembers includes first and second supporting regions on opposite sidesof a first pivot axis; wherein the first electrode is positioned belowthe first supporting region of the first pivoting member, and the secondelectrode is positioned below the first supporting region of the secondpivoting member; wherein the second shield extends from underneath thefirst supporting regions of the first and second pivoting members;wherein the device further comprises: a third electrode positioned belowthe second supporting region of the first pivoting member; a fourthelectrode positioned below the second supporting region of the secondpivoting member; a third shield extending upwardly from the substrateincluding shielding on opposite sides of the third and fourth electrode;and a fourth shield extending downwardly from the second supportingregions of the first and second pivoting members on opposite sides ofthe third and fourth electrodes, respectively.
 11. The device accordingto claim 10, wherein each of the first and second pivoting membersincludes: a brace means extending between the first and secondsupporting regions; a first torsional hinge rotatable about the firstpivot axis extending between the brace means and an anchor postextending from the substrate; whereby the first and second pivotingmember are pivotable about the first pivot axis and are positionable inclose proximity with only an air gap between adjacent first supportingregions and between adjacent second supporting regions.
 12. The deviceaccording to claim 11, wherein each of the first and second pivotingmembers further comprise: a gimbal ring surrounding the first torsionalhinge, opposite ends of the first torsional hinge being fixed toopposite sides of the gimbal ring; a second torsional hinge rotatableabout a second pivot axis perpendicular to the first pivot axis, thesecond torsional hinge comprising first and second arms extending fromopposite sides of the gimbal ring to the first and second supportingregions, respectively; a fifth electrode positioned on the substrate forpivoting of the first pivoting member about the second pivot axis; and asixth electrode positioned on the substrate for pivoting of the secondpivoting member about the second pivot axis.
 13. The device according toclaim 12, wherein said brace means includes a pair of braces extendingbetween the first and second supporting regions on either side of thegimbal ring.
 14. The device according to claim 9, further comprisingback reflection cusps extending below the air gaps between adjacentfirst supporting regions and between adjacent second supporting regionsto prevent light from being reflected back through the air gaps.
 15. Thedevice according to claim 8, wherein each of the first and secondsupporting regions include a reflective surface for redirecting light.16. The device according to claim 1, wherein the first electrodeincludes an upper step positioned underneath an inner end of the firstsupporting region, and a lower step positioned underneath an outer freeend of the first supporting region.
 17. A micro-electro-mechanicaldevice mounted on a substrate comprising; a plurality of platformspivotally mounted above the substrate adjacent each other, and pivotableabout the same or parallel axes; at least one electrode disposed beneatheach of the platforms; and shielding positioned between each adjacentelectrode for reducing fringing electric field from interfering withadjacent platforms.
 18. The device according to claim 17, wherein theshielding extends upwardly from the substrate.
 19. The device accordingto claim 17, wherein the shielding extends downwardly from each of theplatforms.
 20. The device according to claim 17, wherein the shieldingextends upwardly from the substrate and downwardly from each platform,wherein the shielding extending from the substrate is laterally offsetfrom the shielding extending from each platform, whereby during movementof the platforms the shielding extending from the substrate and theshielding from each platform overlap.